常見例句We have grown SiGeC alloy with C incorporated substitutionally by RTP/VLP CVD with noh equilibrium growth technique. We used ethylene as source of carbon. 以 C2 H4 為 C源、采用快速加熱超低壓化學(xué)氣相淀積 (RTP/VL P- CVD)的非平衡生長(zhǎng)技術(shù) ,在 Si(10 0 )襯底上生長(zhǎng)出具有一定代位式 C含量的硅基 Si Ge C合金。Infrared (IR) photo-detectors;Strain Si;SiGeC;SiGe;Image sensors;KOH;Nonisotropic;RTCVD 關(guān)鍵詞:紅外線光感測(cè)器;應(yīng)變矽;矽鍺碳;矽鍺;影像偵測(cè)器;KOH;非等向性;RTCVD 返回 SiGeC