短語詞組短語form and dimensional precision 形狀和尺寸精度Dimensional precision stability 尺寸精度穩(wěn)定性three -dimensional precision platform 三維精密工作臺Multi -dimensional precision micro-actuator 發(fā)明名稱precision dimensional 尺寸精度one -dimensional PSD with high precision 一維高精度PSD 返回 dimensional precision