短語詞組短語photoresist edge body up 硅片邊緣上光刻膠的積聚front edge sticking up 止口反翹;行心反翹edge pick up 邊緣提取edge picking up 慣性photoresist edge build up 硅片邊緣上光刻膠的積累lower edge -up design 自底向上計劃edge pick -up 邊緣提取edge build -up 邊緣凸起變形leading edge up 收起前緣 返回 edge up