短語詞組短語electron -beam lithography technology 電子束光刻技術(shù)scanning -electron-beam lithography system 掃描電子束曝光機scanning electron beam lithography 掃描式電子束刻蝕write electron beam lithography 掃描式電子束光刻Electron Beam Projection Lithography 投射式電子束微影術(shù);電子束微影技術(shù)an electron beam lithography 矢量掃描電子束光刻electron beam lithography machine 電子束曝光機 返回 electron beam lithography