常見例句雙語例句This paper reports a CMOS compatible tungsten micro-hotplate.本文設(shè)計了一種與標(biāo)準(zhǔn)CMOS工藝兼容的鎢微熱板。In this paper, a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.設(shè)計了一種工作在恒電壓模式的、微熱板結(jié)構(gòu)的單片集成電阻真空傳感器芯片。Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.針對微熱板式微氣壓傳感器的靜態(tài)和動態(tài)性能測試，對傳感器的真空測試環(huán)境進行了實時控制仿真。 返回 micro-hotplate