短語(yǔ)詞組短語(yǔ)microwave ECR CVD 微波ECRmicrowave plasma cvd method 微波cvd法Microwave Plasma CVD 微波等離子體CVD;微波等離子體化學(xué)氣相沉積microwave plasma assisted cvd 微波等離子體輔助的化學(xué)氣相沉積microwave cvd reactor 微波cvd反應(yīng)腔microwave plasma enhanced CVD system 微波等離子體增強(qiáng)型Microwave -plasma assisted CVD 微波等離子體microwave plasma -assisted cvd 微波等離子體輔助化學(xué)氣相沉積 返回 microwave cvd