常見例句雙語(yǔ)例句This paper describes the development of phase shifting lithography and its applications in ULSI technology.本文綜述了相移光刻技術(shù)的發(fā)展及其在ULSI中的應(yīng)用。Dishing problem of copper multilayer interconnection in ULSI was introduced, and the reasons and influencing factors were analyzed.介紹了ULSI多層銅互連線中的碟形坑問(wèn)題,對(duì)其產(chǎn)生的原因及影響因素進(jìn)行了分析。In this thesis, we focuse on the microstructure and stress of ULSI Cu interconnects with their impacts on MTF of the electromigration.本論文主要研究了ULSI中銅互連線的微觀結(jié)構(gòu)和應(yīng)力及其對(duì)與電徙動(dòng)MTF的影響。 返回 ulsi