短語詞組短語magnetron plasma sputtering 多靶磁控濺射magnetron rf sputtering system 磁控射頻濺射magnetron co sputtering 磁控共濺射dc magnetron reaction sputtering 直流磁控反應(yīng)濺射DC magnetron reactive sputtering 直流磁控反應(yīng)濺射RF magnetron reactive sputtering 射頻磁控反應(yīng)濺射dc magnetron conductive sputtering 直流磁控反應(yīng)濺射 返回 magnetron sputtering