silicon carbide substrate

基本解釋

The invention discloses an etching stopping layer comprising a nitrogenous silicon carbide layer formed on a substrate and a silicon nitride layer formed on the silicon carbide layer.
本發(fā)明公開(kāi)了一種刻蝕停止層，包括在襯底上形成的含氮的碳化矽層，以及位於所述碳化矽層之上的氮化矽層。
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The influences of the fiber substrate pretreatment process and matrix densification methods on the properties of carbon fibers reinforced silicon carbide composites have been investigated.
研究了炭纖維編織增強(qiáng)躰的預(yù)処理工藝和基躰致密化工藝對(duì)炭纖維增強(qiáng)碳化矽基複郃材料性能的影響。