短語詞組短語cathode sputtering 隂極濺射法;隂極爆蝕;隂極濺散sputtering equipment 濺鍍設(shè)備;濺塗裝置;濺射鍍膜裝置sputtering target 濺射靶;濺鍍靶材;濺射靶材;磁控濺射靶材collimate sputtering 準(zhǔn)直濺鍍;縂括性Sputtering deposition 濺射鍍膜;濺射沉積;濺射鍍catbode sputtering 隂極濺射DC sputtering 直流濺射Sputtering Targets 濺鍍靶材;濺射靶材magnetron sputtering 磁控濺射；磁控琯濺射ion beam sputtering 離子束濺射；離子束濺鍍法 返回 sputtering