常見例句The principle, technological process and equipments of EUVL are discussed and its production cost, application prospects, advantages and disadvantages are also comparably analyzed. 本文論述了EUVL技術的原理、加工工藝和設備，竝對比分析了EUVL的生産成本、應用前景及其優(yōu)缺點。 返回 EUVL