常見例句雙語例句Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;化學(xué)機械拋光; 粗糙表面; 微尺度流動; 拋光液;Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.本文采用激光誘導(dǎo)熒光技術(shù)(LIF)來研究拋光參數(shù)對化學(xué)機械拋光加工區(qū)液膜厚度的影響。The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.研究表明,拋光液膜厚度隨著拋光速度的增加而增加,增加的趨勢隨拋光轉(zhuǎn)速的提高而減緩。 返回 slurry polishing