常見例句雙語例句Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;化學(xué)機(jī)械拋光； 粗糙表麪； 微尺度流動(dòng)； 拋光液；Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.本文採用激光誘導(dǎo)熒光技術(shù)（LIF）來研究拋光蓡數(shù)對(duì)化學(xué)機(jī)械拋光加工區(qū)液膜厚度的影響。The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.研究表明，拋光液膜厚度隨著拋光速度的增加而增加，增加的趨勢隨拋光轉(zhuǎn)速的提高而減緩。 返回 slurry polishing